Development of a secondary-electron ion-microscope for microbeam diagnostics
نویسندگان
چکیده
We describe a novel secondary-electron ion microscope (SEIM), designed for diagnostics of the upcoming submicron Columbia University charged-particle microbeam. This secondary-electron ion microscope allows much higher resolutions, at higher single particle detection efficiencies, than previously available, for rapid and accurate diagnostics of sub-micron charged-particle beams. Based on ion electron-emission microscopy (IEEM) and photo-electron microscopy (PEM), the SEIM involves conversion of the incident projectiles on a secondary-electron emitting film. The ejected electrons are focused using a unipolar electrostatic lens and conical electrostatic mirror to form a magnified image on a microchannel plate (MCP). The flight path of the electrons includes two 45 bends; this ‘‘folded’’ geometry results in lower aberrations than a ‘‘straight’’ design, and enables efficient beam imaging down to 100 nm resolution with >50% single electron transfer efficiency. 2005 Elsevier B.V. All rights reserved. PACS: 41.90.+e; 41.85.Ew; 87.64.Ee
منابع مشابه
Ion, X-ray, UV and Neutron Microbeam Systems for Cell Irradiation.
The array of microbeam cell-irradiation systems, available to users at the Radiological Research Accelerator Facility (RARAF), Center for Radiological Research, Columbia University, is expanding. The HVE 5MV Singletron particle accelerator at the facility provides particles to two focused ion microbeam lines: the sub-micron microbeam II and the permanent magnetic microbeam (PMM). Both the elect...
متن کاملA method for producing site-specific TEM specimens from low contrast materials with nanometer precision.
A method that enables high precision extraction of transmission electron microscope (TEM) specimens in low contrast materials has been developed. The main idea behind this work is to produce high contrast markers on both sides of and close to the area of interest. The markers are filled during the depositing of the protective layer. The marker material can be of either Pt or C depending on whic...
متن کاملAn Electron Microscope Study of Vitally Stained Single Cells Irradiated with a Ruby Laser Microbeam
An electron microscope study has been made of vitally stained single cells whose cytoplasm has been subjected to a localized ruby laser microbeam. Light and moderate laser absorption (the resultant of stain concentration and laser energy density) produced restricted selective damage of mitochondria in cells stained with Janus green B; heavy laser absorption resulted in mitochondrial damage, as ...
متن کاملLow-energy STEM of multilayers and dopant profiles.
A conventional scanning electron microscope equipped with a LaB6 source has been modified to operate in a scanning transmission mode. Two detection strategies have been considered, one based on the direct collection of transmitted electrons, the other on the collection of secondary electrons resulting from the conversion of the transmitted ones. Two types of specimens have been mainly investiga...
متن کاملMicrobeam Characterization of Corning Archeological Reference Glasses: New Additions to the Smithsonian Microbeam Standard Collection
An initial study of the minor element, trace element, and impurities in Corning archeological references glasses have been performed using three microbeam techniques: electron probe microanalysis (EPMA), laser ablation ICP-mass spectrometry (LA ICP-MS), and secondary ion mass spectrometry (SIMS). The EPMA results suggest a significant level of heterogeneity for a number of metals. Conversely, h...
متن کامل